Australia Patent for 'A METHOD FOR RESPONDING TO PROCESS MODULE FAILURE IN RESIDENCY TIME-CONSTRAINED SINGLE-ARM CLUSTER TOOLS' Ceases

Press/Media: Press / Media

PeriodDec 22 2019

Media coverage

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Media coverage

  • TitleAustralia Patent for 'A METHOD FOR RESPONDING TO PROCESS MODULE FAILURE IN RESIDENCY TIME-CONSTRAINED SINGLE-ARM CLUSTER TOOLS' Ceases
    Media name/outletAustralian Government News (Ht Media)
    Country/TerritoryAustralia
    Date12/22/19
    PersonsMengchu Zhou
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