Australia Patent for 'Method for Scheduling Single-arm Cluster Tools with Wafer Revisiting and Residency Time Constraints' Ceases

Press/Media: Press / Media

PeriodSep 4 2020

Media coverage

1

Media coverage

  • TitleAustralia Patent for 'Method for Scheduling Single-arm Cluster Tools with Wafer Revisiting and Residency Time Constraints' Ceases
    Media name/outletAustralian Government News (Ht Media)
    Country/TerritoryAustralia
    Date9/4/20
    PersonsMengchu Zhou
View all 1
View less