Australia Patent for 'ONE-WAFER CYCLIC SCHEDULING OF SINGLE-ARM MULTI-CLUSTER TOOLS WITH TWO-SPACE BUFFERING MODULES' Ceases

Press/Media: Press / Media

PeriodDec 15 2019

Media coverage

1

Media coverage

  • TitleAustralia Patent for 'ONE-WAFER CYCLIC SCHEDULING OF SINGLE-ARM MULTI-CLUSTER TOOLS WITH TWO-SPACE BUFFERING MODULES' Ceases
    Media name/outletAustralian Government News (Ht Media)
    Country/TerritoryAustralia
    Date12/15/19
    PersonsMengchu Zhou