Findings from Fudan University in Micro and Nanoengineering Reported (Regional proximity effect correction for replicating 28 nm lines/spaces in HSQ as dielectric diffraction gratings with high aspect ratio)

Media coverage

• Title	Findings from Fudan University in Micro and Nanoengineering Reported (Regional proximity effect correction for replicating 28 nm lines/spaces in HSQ as dielectric diffraction gratings with high aspect ratio)
  Media name/outlet	Electronics Daily
  Country/Territory	United States
  Date	5/22/25
  Persons	Hao Chen