Engineering & Materials Science
Oxygen
58%
Silicon
54%
Temperature
51%
Atomic layer deposition
48%
Ion beams
44%
Nanostructures
38%
Wavelength
37%
Annealing
37%
Chemical vapor deposition
36%
Reaction rates
35%
Thin films
35%
X rays
34%
Tungsten
33%
Etching
33%
Electric properties
33%
Oxides
32%
Germanium oxides
32%
Multilayers
30%
Rutherford backscattering spectroscopy
29%
Thermoluminescence
28%
Vapors
28%
Surface roughness
26%
Nanophotonics
24%
Atoms
24%
Diffusion barriers
23%
Nanoelectronics
21%
Nitrogen
20%
Fourier transform infrared spectroscopy
19%
Silicon wafers
18%
Optoelectronic devices
18%
Argon
17%
Sheet resistance
17%
Tantalum
17%
Silicides
17%
Microelectronics
16%
Pyrometry
16%
Activation energy
16%
Irradiation
16%
Film thickness
15%
Nanocrystallites
14%
Low pressure chemical vapor deposition
12%
Gases
12%
Rapid thermal annealing
12%
Surface reactions
11%
Oxidation
11%
Defects
10%
Steam
10%
Metals
10%
Optical properties
9%
Thick films
9%
Physics & Astronomy
emissivity
100%
silicon
54%
surface roughness
35%
barrier layers
33%
temperature
29%
reaction kinetics
28%
tungsten
26%
implantation
25%
oxygen
24%
ion beams
24%
vapor deposition
24%
vapors
23%
germanium oxides
23%
oxides
23%
electrical properties
23%
annealing
22%
thin films
19%
reaction time
18%
wafers
17%
thermoluminescence
17%
matrices
17%
x rays
16%
microelectronics
15%
transmittance
15%
wavelengths
15%
infrared spectroscopy
14%
backscattering
13%
nitrogen
13%
tantalum
13%
steam
13%
reflectance
13%
low pressure
13%
silicides
13%
vapor phases
12%
argon
12%
trapping
12%
film thickness
11%
activation energy
11%
atoms
11%
cold walls
10%
irradiation
10%
oxidation
9%
characterization
8%
defects
8%
surface reactions
8%
excitation
7%
thick films
7%
coatings
7%
silicon oxides
6%
leaves
6%
Chemical Compounds
Emissivity
88%
Liquid Film
53%
Atomic Layer Epitaxy
36%
Ion Beam
34%
Surface Roughness
31%
Tungsten
28%
Annealing
28%
Etching
28%
Oxide
28%
Multilayer
27%
Electrical Property
26%
NIR Spectroscopy
22%
Thermoluminescence
20%
Rutherford Backscattering Spectroscopy
20%
Nanomaterial
19%
Diffusion Barrier
19%
Dioxygen
18%
Pressure
18%
Wavelength
15%
Optoelectronics
14%
Dielectric Material
13%
Nitrogen
12%
Sheet Resistance
12%
Application
11%
Rapid Thermal Annealing
11%
Low Pressure Chemical Vapour Deposition
11%
Alloy
10%
Reaction Activation Energy
10%
Fourier Transform Infrared Spectroscopy
8%
Interstitial
8%
Surface Reaction
8%
Grain Boundary
8%
Silicon Oxide
7%
Time
7%
Metal
7%
Mixture
6%
Amount
6%
Leaf Like Crystal
6%
Diffraction Method
6%
Mass Transfer
6%
Optical Property
5%
Surface
5%