Keyphrases
Ultra-thin Silicon Wafer
100%
Ultra-thin Wafer
66%
Virginia
66%
Micro-electro-mechanical Systems
66%
Semiconductors
66%
Silicon-on-insulator
33%
Silicon Wafer Bonding
33%
Wafer Bonding
33%
Research Infrastructure
33%
Academic Research
33%
Optical Characterization
33%
Ultrathin Silicon
33%
Wafer Processing
33%
System Characterization
33%
Electrical Characterization
33%
Micromachining
33%
Infrastructure Program
33%
Joint Patent Application
33%
Silicon Substrate
33%
On-Silicon
33%
Bonding Structure
33%
Silicon Wafer
33%
Engineering
Silicon Wafer
100%
Microelectromechanical System
50%
Wafer Bonding
50%
Silicon Substrate
25%
Joints (Structural Components)
25%
Bonded Structure
25%
Patent Application
25%
Silicon on Insulator
25%
Micro Machining
25%
Infrastructure
12%
Material Science
Silicon Wafer
100%
Silicon
100%
Microelectromechanical System
40%
Micromachining
20%