Keyphrases
Molecular Ions
100%
Large Molecules
100%
Transient Diffusion
100%
Integrated Circuits
66%
Dopant
66%
Junction Formation
66%
Close Proximity
66%
Decaborane
66%
Bell Labs
66%
Ultra-shallow Junction
66%
Ion Implantation
66%
Ion Beam
66%
Defect Production
66%
Low Energy Beam
66%
Boron Implantation
33%
Ion Source
33%
Electrical Junction
33%
Shallow Implantation
33%
Low-energy Ion Implantation
33%
Low Accelerating Voltage
33%
Crucial Aspect
33%
Ultra-shallow
33%
Vacancy Clustering
33%
Medium Energy
33%
Beam Stability
33%
Beamline
33%
Si Surface
33%
Ultra-low Energy
33%
Marker Layer
33%
Atomic Masses
33%
Microelectronics
33%
Bell
33%
Damage Formation
33%
Kinetic Energy
33%
Engineering
Transients
50%
Defects
37%
Dopants
37%
Enhanced Diffusion
37%
Integrated Circuit
25%
Ion Implantation
25%
Close Proximity
25%
Junction Formation
25%
Energy Beam
25%
Shallow Junction
25%
Energy Engineering
25%
Si Surface
12%
Implanted Sample
12%
Ion Source
12%
Accelerating Voltage
12%
Shallower
12%
Formation Damage
12%
Bell Laboratories
12%
Atomic Mass
12%
Leading Manufacturer
12%
Optimum Condition
12%
Microelectronics
12%
Atomic Mass
12%
Material Science
Doping (Additives)
100%
Silicon
100%
Electronic Circuit
66%
Ion Implantation
66%
Surface (Surface Science)
50%
Boron
33%