GOALI: Implantation of Large Molecular Ions Into Silicon

  • Sosnowski, Marek (PI)
  • Poate, J. M. (CoPI)
  • Eaglesham, D. J. (CoPI)
  • Jacobson, D. C. (CoPI)
  • Class, Walter W. (CoPI)

Project: Research project

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Keyphrases

Engineering