Keyphrases
X-ray Lithography
100%
Boron Nitride
100%
Mechanical Properties
33%
Dielectric
33%
Conduction Mechanism
33%
Synchrotron Radiation
33%
Shadow Mask
33%
Electric Field (E-field)
33%
Silicon Carbide Film
33%
Electrical-optical Properties
33%
Highly Doped
33%
Radiation Dose
33%
P-type
33%
Current Density
33%
Silicon Substrate
33%
Electrical Measurements
33%
Electrical Behavior
33%
Capacitor Structure
33%
Potential Change
33%
Material Science
Lithography
100%
Boron Nitride
100%
Film
66%
Aluminum
66%
Density
33%
Silicon
33%
Silicon Carbide
33%
Capacitor
33%
Dielectric Material
16%
Phase Composition
16%
Dielectric Material
16%
Physics
Boron Nitride
100%
Silicon Carbide
33%
Synchrotron Radiation
33%
Electrical Properties
16%
Dielectrics
16%
Optical Properties
16%
Electric Fields
16%
Electric Field
16%
Dielectric Material
16%