Keyphrases
Open Architecture
100%
Low Maintenance
100%
Multilayer Microfluidic Device
100%
Mask Aligner
100%
Master Mold
33%
High-resolution
16%
Low Power Consumption
16%
Microfluidic Applications
16%
Microscale Devices
16%
Light Source
16%
Microfluidics
16%
Biofluids
16%
Scanning Electron Microscopy
16%
Wafer
16%
Commercial Systems
16%
Photoresist
16%
Collimating
16%
UV Illumination
16%
Alignment Accuracy
16%
Translation Stage
16%
Flow Free
16%
Chemical Gradient
16%
Light-emitting Diode (LED) Lamps
16%
Digital Microscope
16%
Gradient Generator
16%
Stencil
16%
Vacuum Chuck
16%
Rotation Stage
16%
Engineering
Microfluidic Device
100%
Master Mold
100%
Microscale
50%
High Resolution
50%
Light Source
50%
Light-Emitting Diode
50%
Low Power Consumption
50%
Photoresist
50%
Free Flow
50%
Material Science
Scanning Electron Microscopy
100%
Light-Emitting Diode
100%