A microfabricated microconcentrator for new generation of micro analytical devices

Minhee Kim, Somenath Mitra

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The development of a silicon micromachined concentrator that can be used with sensors and in micro gas chromatography (GC) was discussed. It was found that the use of microconcentrator could enhance the sensitivity by two or three order of magnitude and makes feasible analysis of very low concentrations. The devices were fabricated on 6-inch silicon substrate using standard photolithographic processes and the channels were lined with a conductive layer through which an electric current could pass causing Ohmic heating. The results show that the preconcentration effect enhanced sensitivity and it was possible to use it as an injector for GC. The microconcentrator response was stable and it exhibited good precision.

Original languageEnglish (US)
Title of host publicationSymposium on Air Quality Measurement Methods and Technology 2004
Pages563-574
Number of pages12
StatePublished - Dec 1 2004
EventSymposium on Air Quality Measurement Methods and Technology 2004 - Cary, NC, United States
Duration: Apr 20 2004Apr 22 2004

Publication series

NameSymposium on Air Quality Measurement Methods and Technology 2004

Other

OtherSymposium on Air Quality Measurement Methods and Technology 2004
CountryUnited States
CityCary, NC
Period4/20/044/22/04

All Science Journal Classification (ASJC) codes

  • Engineering(all)

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