A novel algorithm for wafer sojourn time analysis of single-arm cluster tools with wafer residency time constraints and activity time variation

Chunrong Pan, Yan Qiao, Naiqi Wu, Mengchu Zhou

Research output: Contribution to journalArticlepeer-review

28 Scopus citations

Abstract

This paper addresses the scheduling problem of single-arm cluster tools with both wafer residency time constraints and activity time variation in semiconductor manufacturing. Based on a Petri net model developed in our previous work, polynomial algorithms are proposed to obtain the exact upper bound of the wafer sojourn time delay for the first time. With the obtained results, one can check the feasibility of a given schedule or find a feasible and optimal one if it exists. Illustrative examples are given to show the applications of the proposed method.

Original languageEnglish (US)
Article number6975191
Pages (from-to)805-818
Number of pages14
JournalIEEE Transactions on Systems, Man, and Cybernetics: Systems
Volume45
Issue number5
DOIs
StatePublished - May 1 2015

All Science Journal Classification (ASJC) codes

  • Software
  • Control and Systems Engineering
  • Human-Computer Interaction
  • Computer Science Applications
  • Electrical and Electronic Engineering

Keywords

  • Cluster tools
  • Petri net (PN)
  • discrete event system
  • manufacturing
  • scheduling

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