A novel algorithm for wafer sojourn time analysis of single-arm cluster tools with wafer residency time constraints and activity time variation

Chunrong Pan; Yan Qiao; Naiqi Wu; Mengchu Zhou

doi:10.1109/TSMC.2014.2368995

A novel algorithm for wafer sojourn time analysis of single-arm cluster tools with wafer residency time constraints and activity time variation

Chunrong Pan, Yan Qiao, Naiqi Wu, Mengchu Zhou

Electrical and Computer Engineering

Research output: Contribution to journal › Article › peer-review

50 Scopus citations

Abstract

This paper addresses the scheduling problem of single-arm cluster tools with both wafer residency time constraints and activity time variation in semiconductor manufacturing. Based on a Petri net model developed in our previous work, polynomial algorithms are proposed to obtain the exact upper bound of the wafer sojourn time delay for the first time. With the obtained results, one can check the feasibility of a given schedule or find a feasible and optimal one if it exists. Illustrative examples are given to show the applications of the proposed method.

Original language	English (US)
Article number	6975191
Pages (from-to)	805-818
Number of pages	14
Journal	IEEE Transactions on Systems, Man, and Cybernetics: Systems
Volume	45
Issue number	5
DOIs	https://doi.org/10.1109/TSMC.2014.2368995
State	Published - May 1 2015

All Science Journal Classification (ASJC) codes

Software
Control and Systems Engineering
Human-Computer Interaction
Computer Science Applications
Electrical and Electronic Engineering

Keywords

Cluster tools
Petri net (PN)
discrete event system
manufacturing
scheduling

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10.1109/TSMC.2014.2368995

Cite this

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abstract = "This paper addresses the scheduling problem of single-arm cluster tools with both wafer residency time constraints and activity time variation in semiconductor manufacturing. Based on a Petri net model developed in our previous work, polynomial algorithms are proposed to obtain the exact upper bound of the wafer sojourn time delay for the first time. With the obtained results, one can check the feasibility of a given schedule or find a feasible and optimal one if it exists. Illustrative examples are given to show the applications of the proposed method.",

keywords = "Cluster tools, Petri net (PN), discrete event system, manufacturing, scheduling",

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A novel algorithm for wafer sojourn time analysis of single-arm cluster tools with wafer residency time constraints and activity time variation. / Pan, Chunrong; Qiao, Yan; Wu, Naiqi et al.
In: IEEE Transactions on Systems, Man, and Cybernetics: Systems, Vol. 45, No. 5, 6975191, 01.05.2015, p. 805-818.

Research output: Contribution to journal › Article › peer-review

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PY - 2015/5/1

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AB - This paper addresses the scheduling problem of single-arm cluster tools with both wafer residency time constraints and activity time variation in semiconductor manufacturing. Based on a Petri net model developed in our previous work, polynomial algorithms are proposed to obtain the exact upper bound of the wafer sojourn time delay for the first time. With the obtained results, one can check the feasibility of a given schedule or find a feasible and optimal one if it exists. Illustrative examples are given to show the applications of the proposed method.

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KW - discrete event system

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KW - scheduling

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A novel algorithm for wafer sojourn time analysis of single-arm cluster tools with wafer residency time constraints and activity time variation

Abstract

All Science Journal Classification (ASJC) codes

Keywords

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