A novel approach to scheduling of single-arm cluster tools with wafer revisiting

Nai Qi Wu, Feng Chu, Chengbin Chu, Mengchu Zhou

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Scopus citations

Abstract

This paper conducts a study for scheduling single-arm cluster tools with typical wafer revisiting pattern (mi, mi+1)k where i means the ith-step and mi and mi+1 mean the corresponding quantity of the modules in i and i+1-th steps, and k the number of visiting times. With a Petri net (PN) model, it is shown that, mi=mi+1 =1, the optimal schedule for the revisiting process is deterministic and unique, and the minimal cycle time can be calculated by an analytical expression. It is also shown that, when mi = 1 and mi+1 = 2 or mi = 2 and mi+1 = 1, the optimal one-wafer cyclic schedule for the revisiting process can be obtained in k deterministic schedules by comparing their cycle times. Based on the scheduling and cycle time analysis of a revisiting process, a novel method is presented to schedule the overall system by treating the revisiting process as a macro step.

Original languageEnglish (US)
Title of host publication2009 IEEE International Conference on Automation Science and Engineering, CASE 2009
Pages567-572
Number of pages6
DOIs
StatePublished - Nov 12 2009
Event2009 IEEE International Conference on Automation Science and Engineering, CASE 2009 - Bangalore, India
Duration: Aug 22 2009Aug 25 2009

Publication series

Name2009 IEEE International Conference on Automation Science and Engineering, CASE 2009

Other

Other2009 IEEE International Conference on Automation Science and Engineering, CASE 2009
Country/TerritoryIndia
CityBangalore
Period8/22/098/25/09

All Science Journal Classification (ASJC) codes

  • Computer Networks and Communications
  • Computer Science Applications
  • Software

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