A novel failure response policy for single-arm cluster tools with residency time constraints

Yan Qiao, Nai Qi Wu, Chun Rong Pan, Meng Chu Zhou

Research output: Contribution to journalConference articlepeer-review


It is very challenging to schedule a residency timeconstrained single-arm cluster tool with failure-prone process modules. In some cases, when a failure occurs, the degraded tool is not schedulable. However, it is highly desired to respond to a process module failure properly such that the tool can continue working and the wafers in the tool can be completed in a feasible way. Thus, in this paper, Petri net models are developed to describe the discrete-event behavior of a single-arm cluster tool. With the models, failure response policies are given to control the cluster tool such that it can keep working without violating any residency time constraints. They are implemented via efficient real-time control laws. Illustrative examples are presented to show their usage.

Original languageEnglish (US)
Article number6973894
Pages (from-to)120-126
Number of pages7
JournalConference Proceedings - IEEE International Conference on Systems, Man and Cybernetics
Issue numberJanuary
StatePublished - 2014
Event2014 IEEE International Conference on Systems, Man, and Cybernetics, SMC 2014 - San Diego, United States
Duration: Oct 5 2014Oct 8 2014

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering
  • Control and Systems Engineering
  • Human-Computer Interaction


  • Cluster tools
  • Failure response
  • Petri net
  • Scheduling
  • Wafer fabrication


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