Abstract
It is very challenging to schedule a residency timeconstrained single-arm cluster tool with failure-prone process modules. In some cases, when a failure occurs, the degraded tool is not schedulable. However, it is highly desired to respond to a process module failure properly such that the tool can continue working and the wafers in the tool can be completed in a feasible way. Thus, in this paper, Petri net models are developed to describe the discrete-event behavior of a single-arm cluster tool. With the models, failure response policies are given to control the cluster tool such that it can keep working without violating any residency time constraints. They are implemented via efficient real-time control laws. Illustrative examples are presented to show their usage.
| Original language | English (US) |
|---|---|
| Article number | 6973894 |
| Pages (from-to) | 120-126 |
| Number of pages | 7 |
| Journal | Conference Proceedings - IEEE International Conference on Systems, Man and Cybernetics |
| Volume | 2014-January |
| Issue number | January |
| DOIs | |
| State | Published - 2014 |
| Event | 2014 IEEE International Conference on Systems, Man, and Cybernetics, SMC 2014 - San Diego, United States Duration: Oct 5 2014 → Oct 8 2014 |
All Science Journal Classification (ASJC) codes
- Electrical and Electronic Engineering
- Control and Systems Engineering
- Human-Computer Interaction
Keywords
- Cluster tools
- Failure response
- Petri net
- Scheduling
- Wafer fabrication