A novel low-cost high-throughput probe card scanner analyzer for characterization of magnetic tunnel junctions

Philip W.T. Pong, Moshe Schmoueli, Eliezer Marcus, William F. Egelhoff

Research output: Chapter in Book/Report/Conference proceedingConference contribution


The advancement of the technology of magnetic tunnel junctions (MTJs) greatly hinges on the optimization of the magnetic materials, fabrication process, and annealing conditions which involve characterization of a large number of samples. As such, it is of paramount importance to have a rapid-turnaround characterization method since the characterization process can take even longer time than the fabrication. Conventionally, micropositioners and probe tips are manually operated to perform 4-point electrical measurement on each individual device which is a time-consuming, low-throughput process. A commercial automatic probe card analyzer can provide high turnaround; however, it is expensive and involves much cost and labor to install and maintain the equipment. In view of this, we have developed a novel low-cost, home-made, high-throughput probe card analyzer system for characterization of MTJs. It can perform fast 4-probe electrical measurements including current vs voltage, magnetoresistance, and bias dependence measurements with a high turnaround of about 500 devices per hour. The design and construction of the system is discussed in detail in this paper.

Original languageEnglish (US)
Title of host publicationInstrumentation, Metrology, and Standards for Nanomanufacturing
StatePublished - 2007
Externally publishedYes
EventInstrumentation, Metrology, and Standards for Nanomanufacturing - San Diego, CA, United States
Duration: Aug 29 2007Aug 30 2007

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
ISSN (Print)0277-786X


ConferenceInstrumentation, Metrology, and Standards for Nanomanufacturing
Country/TerritoryUnited States
CitySan Diego, CA

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering


  • Alignment
  • Magnetic tunnel junctions
  • Probe card analyzer
  • Tunneling magnetoresistance


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