A novel scheduling approach to dual-arm cluster tools with wafer revisiting

Nai Qi Wu; Meng Chu Zhou

doi:10.1109/ICSMC.2012.6377897

A novel scheduling approach to dual-arm cluster tools with wafer revisiting

Nai Qi Wu, Meng Chu Zhou

Electrical and Computer Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

2 Scopus citations

Abstract

It has been shown that, for dual-arm cluster tools with wafer revisiting, a swap strategy may not be optimal. To improve the performance of such a system, a Petri net model is developed in this work. Based on it, dynamical behavior of the wafer production process is analyzed. Then, two new scheduling methods called 2-wafer cyclic schedules are presented. Cycle time analysis shows that, under some conditions, the performance obtained by the 2-wafer cyclic schedules is better than that obtained by a swap strategy. Thus, the methods presented in this paper and the swap strategy can be used to complement each other in optimally scheduling dual-arm cluster tools with wafer revisiting. Illustrative examples are presented to show the results.

Original language	English (US)
Title of host publication	Proceedings 2012 IEEE International Conference on Systems, Man, and Cybernetics, SMC 2012
Pages	1213-1218
Number of pages	6
DOIs	https://doi.org/10.1109/ICSMC.2012.6377897
State	Published - 2012
Event	2012 IEEE International Conference on Systems, Man, and Cybernetics, SMC 2012 - Seoul, Korea, Republic of Duration: Oct 14 2012 → Oct 17 2012

Publication series

Name	Conference Proceedings - IEEE International Conference on Systems, Man and Cybernetics
ISSN (Print)	1062-922X

Other

Other	2012 IEEE International Conference on Systems, Man, and Cybernetics, SMC 2012
Country/Territory	Korea, Republic of
City	Seoul
Period	10/14/12 → 10/17/12

All Science Journal Classification (ASJC) codes

Electrical and Electronic Engineering
Control and Systems Engineering
Human-Computer Interaction

Keywords

Petri nets
cluster tool
scheduling
semiconductor manufacturing

Access to Document

10.1109/ICSMC.2012.6377897

Cite this

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title = "A novel scheduling approach to dual-arm cluster tools with wafer revisiting",

abstract = "It has been shown that, for dual-arm cluster tools with wafer revisiting, a swap strategy may not be optimal. To improve the performance of such a system, a Petri net model is developed in this work. Based on it, dynamical behavior of the wafer production process is analyzed. Then, two new scheduling methods called 2-wafer cyclic schedules are presented. Cycle time analysis shows that, under some conditions, the performance obtained by the 2-wafer cyclic schedules is better than that obtained by a swap strategy. Thus, the methods presented in this paper and the swap strategy can be used to complement each other in optimally scheduling dual-arm cluster tools with wafer revisiting. Illustrative examples are presented to show the results.",

keywords = "Petri nets, cluster tool, scheduling, semiconductor manufacturing",

author = "Wu, {Nai Qi} and Zhou, {Meng Chu}",

year = "2012",

doi = "10.1109/ICSMC.2012.6377897",

language = "English (US)",

isbn = "9781467317146",

series = "Conference Proceedings - IEEE International Conference on Systems, Man and Cybernetics",

pages = "1213--1218",

booktitle = "Proceedings 2012 IEEE International Conference on Systems, Man, and Cybernetics, SMC 2012",

note = "2012 IEEE International Conference on Systems, Man, and Cybernetics, SMC 2012 ; Conference date: 14-10-2012 Through 17-10-2012",

}

Wu, NQ & Zhou, MC 2012, A novel scheduling approach to dual-arm cluster tools with wafer revisiting. in Proceedings 2012 IEEE International Conference on Systems, Man, and Cybernetics, SMC 2012., 6377897, Conference Proceedings - IEEE International Conference on Systems, Man and Cybernetics, pp. 1213-1218, 2012 IEEE International Conference on Systems, Man, and Cybernetics, SMC 2012, Seoul, Korea, Republic of, 10/14/12. https://doi.org/10.1109/ICSMC.2012.6377897

A novel scheduling approach to dual-arm cluster tools with wafer revisiting. / Wu, Nai Qi; Zhou, Meng Chu.
Proceedings 2012 IEEE International Conference on Systems, Man, and Cybernetics, SMC 2012. 2012. p. 1213-1218 6377897 (Conference Proceedings - IEEE International Conference on Systems, Man and Cybernetics).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

TY - GEN

T1 - A novel scheduling approach to dual-arm cluster tools with wafer revisiting

AU - Wu, Nai Qi

AU - Zhou, Meng Chu

PY - 2012

Y1 - 2012

N2 - It has been shown that, for dual-arm cluster tools with wafer revisiting, a swap strategy may not be optimal. To improve the performance of such a system, a Petri net model is developed in this work. Based on it, dynamical behavior of the wafer production process is analyzed. Then, two new scheduling methods called 2-wafer cyclic schedules are presented. Cycle time analysis shows that, under some conditions, the performance obtained by the 2-wafer cyclic schedules is better than that obtained by a swap strategy. Thus, the methods presented in this paper and the swap strategy can be used to complement each other in optimally scheduling dual-arm cluster tools with wafer revisiting. Illustrative examples are presented to show the results.

AB - It has been shown that, for dual-arm cluster tools with wafer revisiting, a swap strategy may not be optimal. To improve the performance of such a system, a Petri net model is developed in this work. Based on it, dynamical behavior of the wafer production process is analyzed. Then, two new scheduling methods called 2-wafer cyclic schedules are presented. Cycle time analysis shows that, under some conditions, the performance obtained by the 2-wafer cyclic schedules is better than that obtained by a swap strategy. Thus, the methods presented in this paper and the swap strategy can be used to complement each other in optimally scheduling dual-arm cluster tools with wafer revisiting. Illustrative examples are presented to show the results.

KW - Petri nets

KW - cluster tool

KW - scheduling

KW - semiconductor manufacturing

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ER -

A novel scheduling approach to dual-arm cluster tools with wafer revisiting

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All Science Journal Classification (ASJC) codes

Keywords

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