A petri-net approach to modular supervision with conflict resolution for semiconductor manufacturing systems

Jin Shyan Lee; Meng Chu Zhou; Pau Lo Hsu

doi:10.1109/TASE.2007.905995

A petri-net approach to modular supervision with conflict resolution for semiconductor manufacturing systems

Jin Shyan Lee, Meng Chu Zhou, Pau Lo Hsu

Electrical and Computer Engineering

Research output: Contribution to journal › Article › peer-review

23 Scopus citations

Abstract

In a semiconductor manufacturing system, particular human operations may violate desired requirements and lead to destructive failure. For such human-in-the-loop systems, this paper proposes a supervisory framework which guarantees that manual operations meet required specifications so as to prevent human errors in operation using Petri nets. Moreover, a modular technique with an intersection mechanism is proposed in order to cope with the state-space explosion problem of large-scale systems. A rapid thermal process in semiconductor manufacturing systems is provided to show the practicability of the proposed approach.

Original language	English (US)
Pages (from-to)	584-588
Number of pages	5
Journal	IEEE Transactions on Automation Science and Engineering
Volume	4
Issue number	4
DOIs	https://doi.org/10.1109/TASE.2007.905995
State	Published - Oct 2007

All Science Journal Classification (ASJC) codes

Control and Systems Engineering
Electrical and Electronic Engineering

Keywords

Human-in-the-loop
Modular supervision
Petri nets (PNs)
Rapid thermal processes
Semiconductor manufacturing systems
Supervisory control

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10.1109/TASE.2007.905995

Cite this

@article{84f6bd87c7a84459b739e6f5a81d96e1,

title = "A petri-net approach to modular supervision with conflict resolution for semiconductor manufacturing systems",

abstract = "In a semiconductor manufacturing system, particular human operations may violate desired requirements and lead to destructive failure. For such human-in-the-loop systems, this paper proposes a supervisory framework which guarantees that manual operations meet required specifications so as to prevent human errors in operation using Petri nets. Moreover, a modular technique with an intersection mechanism is proposed in order to cope with the state-space explosion problem of large-scale systems. A rapid thermal process in semiconductor manufacturing systems is provided to show the practicability of the proposed approach.",

keywords = "Human-in-the-loop, Modular supervision, Petri nets (PNs), Rapid thermal processes, Semiconductor manufacturing systems, Supervisory control",

author = "Lee, {Jin Shyan} and Zhou, {Meng Chu} and Hsu, {Pau Lo}",

note = "Funding Information: Manuscript received June 30, 2006; revised October 20, 2006. This paper was recommended for publication by Associate Editor M. Zhang and Editor N. Viswanadham upon evaluation of the reviewers{\textquoteright} comments. This work was supported in part by the National Science Council, Taiwan, under Grant NSC 92-2917-I-009-005, in part by the Ministry of Education, Taiwan, under Grant Ex-91-E-FA06-4-4, in part by the Chang Jiang Scholars Program, Ministry of Education, PRC, and in part by the Ministry of Economic Affairs, Taiwan, under the Embedded System Software Laboratory in Domestic Communication and Optoelectronics Infrastructure Construction Project.",

year = "2007",

month = oct,

doi = "10.1109/TASE.2007.905995",

language = "English (US)",

volume = "4",

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T1 - A petri-net approach to modular supervision with conflict resolution for semiconductor manufacturing systems

AU - Lee, Jin Shyan

AU - Zhou, Meng Chu

AU - Hsu, Pau Lo

N1 - Funding Information: Manuscript received June 30, 2006; revised October 20, 2006. This paper was recommended for publication by Associate Editor M. Zhang and Editor N. Viswanadham upon evaluation of the reviewers’ comments. This work was supported in part by the National Science Council, Taiwan, under Grant NSC 92-2917-I-009-005, in part by the Ministry of Education, Taiwan, under Grant Ex-91-E-FA06-4-4, in part by the Chang Jiang Scholars Program, Ministry of Education, PRC, and in part by the Ministry of Economic Affairs, Taiwan, under the Embedded System Software Laboratory in Domestic Communication and Optoelectronics Infrastructure Construction Project.

PY - 2007/10

Y1 - 2007/10

N2 - In a semiconductor manufacturing system, particular human operations may violate desired requirements and lead to destructive failure. For such human-in-the-loop systems, this paper proposes a supervisory framework which guarantees that manual operations meet required specifications so as to prevent human errors in operation using Petri nets. Moreover, a modular technique with an intersection mechanism is proposed in order to cope with the state-space explosion problem of large-scale systems. A rapid thermal process in semiconductor manufacturing systems is provided to show the practicability of the proposed approach.

AB - In a semiconductor manufacturing system, particular human operations may violate desired requirements and lead to destructive failure. For such human-in-the-loop systems, this paper proposes a supervisory framework which guarantees that manual operations meet required specifications so as to prevent human errors in operation using Petri nets. Moreover, a modular technique with an intersection mechanism is proposed in order to cope with the state-space explosion problem of large-scale systems. A rapid thermal process in semiconductor manufacturing systems is provided to show the practicability of the proposed approach.

KW - Human-in-the-loop

KW - Modular supervision

KW - Petri nets (PNs)

KW - Rapid thermal processes

KW - Semiconductor manufacturing systems

KW - Supervisory control

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A petri-net approach to modular supervision with conflict resolution for semiconductor manufacturing systems

Abstract

All Science Journal Classification (ASJC) codes

Keywords

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