A petri-net approach to modular supervision with conflict resolution for semiconductor manufacturing systems

Jin Shyan Lee, Meng Chu Zhou, Pau Lo Hsu

Research output: Contribution to journalArticlepeer-review

21 Scopus citations

Abstract

In a semiconductor manufacturing system, particular human operations may violate desired requirements and lead to destructive failure. For such human-in-the-loop systems, this paper proposes a supervisory framework which guarantees that manual operations meet required specifications so as to prevent human errors in operation using Petri nets. Moreover, a modular technique with an intersection mechanism is proposed in order to cope with the state-space explosion problem of large-scale systems. A rapid thermal process in semiconductor manufacturing systems is provided to show the practicability of the proposed approach.

Original languageEnglish (US)
Pages (from-to)584-588
Number of pages5
JournalIEEE Transactions on Automation Science and Engineering
Volume4
Issue number4
DOIs
StatePublished - Oct 2007

All Science Journal Classification (ASJC) codes

  • Control and Systems Engineering
  • Electrical and Electronic Engineering

Keywords

  • Human-in-the-loop
  • Modular supervision
  • Petri nets (PNs)
  • Rapid thermal processes
  • Semiconductor manufacturing systems
  • Supervisory control

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