A Petri net method for schedulability and scheduling problems in single-arm cluster tools with wafer residency time constraints

Naiqi Wu, Chengbin Chu, Feng Chu, Meng Chu Zhou

Research output: Contribution to journalArticlepeer-review

191 Scopus citations

Abstract

With wafer residency time constraints for some wafer fabrication processes, such as low pressure chemicalvapor deposition, the schedulability and scheduling problems are still open. This paper aims to solve both problems. A Petri net (PN) model is developed for the system. This model describes when the robot should wait and a robot wait is modeled as an event in an explicit way. Thus, to schedule a single-arm cluster tool with wafer residency time constraint is to decide how long a robot wait should be. Based on this model, for the first time, we present the necessary and sufficient conditions under which a single-arm cluster tool with residency time constraints is schedulable, which can be checked analytically. Meanwhile, a closed form scheduling algorithm is developed to find an optimal periodic schedule if it is schedulable. Also, a simple method is presented for the implementation of the periodic schedule for steady state, which is not seen in any previous work.

Original languageEnglish (US)
Article number4512066
Pages (from-to)224-236
Number of pages13
JournalIEEE Transactions on Semiconductor Manufacturing
Volume21
Issue number2
DOIs
StatePublished - May 2008

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Industrial and Manufacturing Engineering
  • Electrical and Electronic Engineering

Keywords

  • Automated manufacturing system
  • Cluster tool
  • Petri nets (PN)
  • Schedulability
  • Scheduling
  • Semiconductor manufacturing

Fingerprint Dive into the research topics of 'A Petri net method for schedulability and scheduling problems in single-arm cluster tools with wafer residency time constraints'. Together they form a unique fingerprint.

Cite this