Engineering & Materials Science
Low pressure chemical vapor deposition
100%
Aluminum
47%
Metals
39%
Vapors
15%
Silicon wafers
10%
Metallizing
10%
Transmission electron microscopy
8%
Deposits
8%
Pyrolysis
8%
Chemical activation
7%
Surface roughness
7%
Textures
7%
Substrates
6%
Fibers
5%
Physics & Astronomy
low pressure
51%
vapor deposition
47%
aluminum
42%
metals
31%
vapors
13%
pyrolysis
8%
deposits
7%
surface roughness
7%
examination
7%
textures
7%
activation
6%
wafers
6%
reflectance
6%
transmission electron microscopy
5%
electrical resistivity
5%
Chemical Compounds
Low Pressure Chemical Vapour Deposition
89%
Liquid Film
29%
Surface Roughness
8%
Pyrolysis
6%
Transmission Electron Microscopy
5%
Fiber
5%