An accurate ellipsometric reflectance ratio method

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Abstract

The absolute reflectance ratio, mod rho mod , given as the amplitude of the parallel to the normal reflectance, is determined unambiguously using two detectors. This is achieved even when the incident source intensity during the parallel reflectance measurement is different from that for the measurement of the normal reflectance. The reflected beam is divided into two parts and the parallel reflectance of one part is measured at the same time as the normal reflectance of the other. The measurements are repeated with each analyser rotated by 90 degrees , and the product of the two ratios formed by each set of measurements is used to yield mod rho mod which is independent of source variations.

Original languageEnglish (US)
Article number003
Pages (from-to)1723-1730
Number of pages8
JournalJournal of Physics D: Applied Physics
Volume18
Issue number9
DOIs
StatePublished - Dec 1 1985

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Acoustics and Ultrasonics
  • Surfaces, Coatings and Films

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