An ultra-sensitive optical MEMS sensor for partial discharge detection

Xiaodong Wang; Baoqing Li; Zhixiong Xiao; Sang Hwui Lee; Harry Roman; Onofrio L. Russo; Ken K. Chin; Kenneth R. Farmer

doi:10.1088/0960-1317/15/3/012

An ultra-sensitive optical MEMS sensor for partial discharge detection

Xiaodong Wang, Baoqing Li, Zhixiong Xiao, Sang Hwui Lee, Harry Roman, Onofrio L. Russo, Ken K. Chin, Kenneth R. Farmer

Research output: Contribution to journal › Article › peer-review

105 Scopus citations

Abstract

A diaphragm-based interferometric fiber optical microelectromechanical system sensor with high sensitivity is designed and tested for on-line detection of the acoustic waves generated by partial discharges (PD) inside high-voltage power transformers. In principle, the sensor is made according to Fabry Perot interference, which is placed on a micro-machined rectangular silicon membrane as a pressure-sensitive element. A fiber-optic readout scheme has been used to monitor sensor membrane deflection. Sensor design, fabrication, characterization, and application in PD acoustic detection are described. Test results indicate that the fiber optical sensor is capable of detecting PD acoustic signals propagating inside transformer oil with high sensitivity.

Original language	English (US)
Pages (from-to)	521-527
Number of pages	7
Journal	Journal of Micromechanics and Microengineering
Volume	15
Issue number	3
DOIs	https://doi.org/10.1088/0960-1317/15/3/012
State	Published - Mar 2005

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Mechanics of Materials
Mechanical Engineering
Electrical and Electronic Engineering

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10.1088/0960-1317/15/3/012

Cite this

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title = "An ultra-sensitive optical MEMS sensor for partial discharge detection",

abstract = "A diaphragm-based interferometric fiber optical microelectromechanical system sensor with high sensitivity is designed and tested for on-line detection of the acoustic waves generated by partial discharges (PD) inside high-voltage power transformers. In principle, the sensor is made according to Fabry Perot interference, which is placed on a micro-machined rectangular silicon membrane as a pressure-sensitive element. A fiber-optic readout scheme has been used to monitor sensor membrane deflection. Sensor design, fabrication, characterization, and application in PD acoustic detection are described. Test results indicate that the fiber optical sensor is capable of detecting PD acoustic signals propagating inside transformer oil with high sensitivity.",

author = "Xiaodong Wang and Baoqing Li and Zhixiong Xiao and Lee, {Sang Hwui} and Harry Roman and Russo, {Onofrio L.} and Chin, {Ken K.} and Farmer, {Kenneth R.}",

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AU - Wang, Xiaodong

AU - Li, Baoqing

AU - Xiao, Zhixiong

AU - Lee, Sang Hwui

AU - Roman, Harry

AU - Russo, Onofrio L.

AU - Chin, Ken K.

AU - Farmer, Kenneth R.

PY - 2005/3

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N2 - A diaphragm-based interferometric fiber optical microelectromechanical system sensor with high sensitivity is designed and tested for on-line detection of the acoustic waves generated by partial discharges (PD) inside high-voltage power transformers. In principle, the sensor is made according to Fabry Perot interference, which is placed on a micro-machined rectangular silicon membrane as a pressure-sensitive element. A fiber-optic readout scheme has been used to monitor sensor membrane deflection. Sensor design, fabrication, characterization, and application in PD acoustic detection are described. Test results indicate that the fiber optical sensor is capable of detecting PD acoustic signals propagating inside transformer oil with high sensitivity.

AB - A diaphragm-based interferometric fiber optical microelectromechanical system sensor with high sensitivity is designed and tested for on-line detection of the acoustic waves generated by partial discharges (PD) inside high-voltage power transformers. In principle, the sensor is made according to Fabry Perot interference, which is placed on a micro-machined rectangular silicon membrane as a pressure-sensitive element. A fiber-optic readout scheme has been used to monitor sensor membrane deflection. Sensor design, fabrication, characterization, and application in PD acoustic detection are described. Test results indicate that the fiber optical sensor is capable of detecting PD acoustic signals propagating inside transformer oil with high sensitivity.

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An ultra-sensitive optical MEMS sensor for partial discharge detection

Abstract

All Science Journal Classification (ASJC) codes

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