Analysis and control of monolithic piezoelectric nano-actuator

Timothy N. Chang, Xuemei Sun, Zhiming Ji, Reggie Caudill

Research output: Contribution to journalConference articlepeer-review

1 Scopus citations


This paper describes the analysis and control of a two Degree-Of-Freedom (DOF) monolithic piezoelectric actuator. This actuator is part of a 6 DOF manipulator [1] capable of linear resolution to 2 nanometer and angular resolution to 1 arc-second. Design of this actuator differs from the existing ones in that it has a monolithic structure which enables a high bandwidth, low drift, and high force realization. A number of nonlinearities exist in the actuator, stemming from the geometry and materials properties. For example, coupling of the actuator elements can be modeled as a soft spring which increases scale factor at high actuation levels. In this work, a combination of feedforward (amplitude-dependent input shaping) and feedback control are applied to reduce the effects of 1) scale factor nonlinearities, 2) hysteresis, and 3) output oscillations. Application of this actuator include: optoelectronics assembly, optical fiber alignment, and semiconductor processing.

Original languageEnglish (US)
Pages (from-to)3086-3090
Number of pages5
JournalProceedings of the American Control Conference
StatePublished - 2000
Event2000 American Control Conference - Chicago, IL, USA
Duration: Jun 28 2000Jun 30 2000

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering


Dive into the research topics of 'Analysis and control of monolithic piezoelectric nano-actuator'. Together they form a unique fingerprint.

Cite this