Analysis and control of monolithic piezoelectric nano-actuator

Engineering

• Piezoelectric 100%
• Nonlinearity 100%
• Scale Factor 100%
• Degree of Freedom 50%
• Optical Fiber 50%
• Nanometre 50%
• Optoelectronics 50%
• Actuation 50%
• Realization 50%
• Feedforward 50%
• Angular Resolution 50%
• Feedback Control System 50%
• Two Degree of Freedom 50%
• Manipulator 50%
• Piezoelectric Actuator 50%
• Fiber Alignment 50%

Keyphrases

• Actuator 100%
• Nanoactuators 100%
• Oscillation 20%
• Material Properties 20%
• High Bandwidth 20%
• Nonlinearity 20%
• Manipulator 20%
• Actuation 20%
• Angular Resolution 20%
• Two-degree-of-freedom 20%
• Nanometer Resolution 20%
• Six Degrees of Freedom 20%
• Geometric Properties 20%
• Hysteresis 20%
• Drift Force 20%
• Linear Resolution 20%
• Semiconductor Processing 20%
• High Force 20%
• Monolithic Structure 20%
• Piezoelectric Actuator 20%
• Optical Fiber Alignment 20%
• Scale Factor 20%
• Feedback Control 20%
• Low Drift 20%
• Amplitude-dependent 20%
• Soft Spring 20%
• Input Shaping Control 20%
• Dependent Inputs 20%
• Scale Factor Nonlinearity 20%