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Analysis and control of monolithic piezoelectric nano-actuator
Timothy N. Chang
, Xuemei Sun
,
Zhiming Ji
, Reggie Caudill
Mechanical and Industrial Engr
MT School of Management
Office of the Dean - MTSM
Research output
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Contribution to journal
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Conference article
›
peer-review
1
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Keyphrases
Actuator
100%
Nanoactuators
100%
Oscillation
20%
Material Properties
20%
Nonlinearity
20%
Manipulator
20%
Actuation
20%
Angular Resolution
20%
Two-degree-of-freedom
20%
Nanometer Resolution
20%
Six Degrees of Freedom
20%
Geometric Properties
20%
Hysteresis
20%
Drift Force
20%
Linear Resolution
20%
Semiconductor Processing
20%
High Force
20%
Monolithic Structure
20%
Piezoelectric Actuator
20%
Optical Fiber Alignment
20%
Scale Factor
20%
Feedback Control
20%
Low Drift
20%
Amplitude-dependent
20%
Soft Spring
20%
Input Shaping Control
20%
Dependent Inputs
20%
Scale Factor Nonlinearity
20%
High Bandwidth
20%
Engineering
Piezoelectric
100%
Actuator
100%
Scale Factor
33%
Nonlinearity
33%
Degree of Freedom
16%
Optical Fiber
16%
Nanometre
16%
Optoelectronics
16%
Actuation
16%
Realization
16%
Feedforward
16%
Angular Resolution
16%
Two Degree of Freedom
16%
Manipulator
16%
Fiber Alignment
16%
Feedback Control
16%
Piezoelectric Actuator
16%
Physics
Piezoelectricity
100%
Actuator
100%
Degree of Freedom
33%
Optoelectronics
16%
Manipulator
16%
Feedback Control
16%
Fiber Optic
16%
Piezoelectric Actuator
16%
Material Science
Piezoelectricity
100%
Actuator
100%
Fiber Optics
14%
Materials Property
14%