This study describes the use of inductively coupled plasma-atomic emission spectroscopy (ICP-AES) as an analytical technique for determining the composition of borophosphosilicate glass films. Results indicate that this technique can provide precise multielemental analysis of solutions of small film samples. Concentrations of boron and phosphorus determined by this technique are shown to be consistent with results obtained by electron microprobe analysis.
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Renewable Energy, Sustainability and the Environment
- Surfaces, Coatings and Films
- Materials Chemistry