Analysis of borophosphosilicate glass films by inductively coupled plasma-atomic emission spectroscopy

R. A. Levy, T. Y. Kometani

Research output: Contribution to journalArticlepeer-review

10 Scopus citations

Abstract

This study describes the use of inductively coupled plasma-atomic emission spectroscopy (ICP-AES) as an analytical technique for determining the composition of borophosphosilicate glass films. Results indicate that this technique can provide precise multielemental analysis of solutions of small film samples. Concentrations of boron and phosphorus determined by this technique are shown to be consistent with results obtained by electron microprobe analysis.

Original languageEnglish (US)
Pages (from-to)1565-1567
Number of pages3
JournalJournal of the Electrochemical Society
Volume134
Issue number6
DOIs
StatePublished - Jan 1 1987
Externally publishedYes

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Renewable Energy, Sustainability and the Environment
  • Surfaces, Coatings and Films
  • Electrochemistry
  • Materials Chemistry

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