Analysis of borophosphosilicate glass films by inductively coupled plasma-atomic emission spectroscopy

Keyphrases

• Glass Film 100%
• Borophosphosilicate Glass 100%
• Inductively Coupled Plasma Atomic Emission Spectrometry 100%
• Phosphorus 50%
• Boron 50%
• Analytical Techniques 50%
• Solution Analysis 50%
• Elemental Analysis 50%
• Electron Microprobe Analysis 50%

Material Science

• Film 100%
• Inductively Coupled Plasma Atomic Emission Spectroscopy 100%
• Analytical Method 33%
• Boron 33%
• Electron Microprobe 33%