Application of transmission electron detection to SCALPEL mask metrology

R. C. Farrow, M. T. Postek, W. J. Keery, S. N. Jones, J. R. Lowney, M. Blakey, L. A. Fetter, J. E. Griffith, J. A. Liddle, L. C. Hopkins, H. A. Huggins, M. Peabody, A. Novembre

Research output: Contribution to journalArticlepeer-review

10 Scopus citations

Abstract

Linewidth measurements were performed on a 4X scattering with angular limitation in projection electron lithography (SCALPEL) e-beam lithography mask using the transmitted electron signal in a modified scanning electron microscope. Features as small as 0.24 μm were measured on the mask. The thin membrane mask structure that was used is found to provide sufficient transmitted signal contrast at energies ranging from 10 to 30 keV. The linewidth measurement accuracy is mostly limited by the variations in the material and not the measurement system. It is concluded that the linewidth measurement technique using transmitted electrons is suitable for the potential certification of SCALPEL mask standards.

Original languageEnglish (US)
Pages (from-to)2167-2172
Number of pages6
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume15
Issue number6
DOIs
StatePublished - 1997

All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics
  • Electrical and Electronic Engineering

Fingerprint Dive into the research topics of 'Application of transmission electron detection to SCALPEL mask metrology'. Together they form a unique fingerprint.

Cite this