Atomic Layer Deposition and Atomic Layer Etching—An Overview of Selective Processes

Samiha Hossain, Oktay H. Gokce, N. M. Ravindra

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Fingerprint

Dive into the research topics of 'Atomic Layer Deposition and Atomic Layer Etching—An Overview of Selective Processes'. Together they form a unique fingerprint.

Engineering & Materials Science

Chemical Compounds