Atomic nitrogen generation system for reactive deposition of thin films

Marek Sosnowski, Miro Guzinski, Roy Cornely

Research output: Contribution to journalArticlepeer-review

2 Scopus citations

Fingerprint

Dive into the research topics of 'Atomic nitrogen generation system for reactive deposition of thin films'. Together they form a unique fingerprint.

Keyphrases

Material Science

Chemical Engineering