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BF2 implanted polycrystalline silicon gates with and without CoSi2: Microstructure and work functions
S. Lindenberger, G. E. Georgiou, S. J. Hillenius, H. Luftman, F. A. Baiocchi, T. T. Sheng, R. L. Field
Research output: Contribution to journal › Article › peer-review
2
Scopus
citations