Bias temperature instability and its correlation to flicker (1/f) noise in FinFETs

Keyphrases

• Thin Gate Oxide 100%
• Bias Temperature Instability 100%
• Fin Field-effect Transistor (FinFET) 100%
• Thick Gate Oxide 100%
• P-FET 100%
• Diagnostic Tool 50%
• Oxides 50%
• Noise Generation Mechanism 50%
• Degradation Mechanism 50%
• Noise Spectrum 50%
• NMOS 50%
• Metal Gate 50%
• Mobility Fluctuation 50%
• Flicker Noise 50%
• Carrier number Fluctuations 50%
• Fluctuation Model 50%
• Defect Location 50%

Engineering

• Gate Oxide 100%
• Defects 66%
• Degradation Mechanism 33%
• Metal Gate 33%
• Flicker Noise 33%
• Noise Spectra 33%