Buffer space configuration and scheduling analysis of single-arm multi-cluster tools

Li Ping Bai, Nai Qi Wu, Zhi Wu Li, Mengchu Zhou

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This work studies the buffer space configuration problem to obtain an optimal one-wafer cyclic schedule for single-arm multi-cluster tools with a linear topology. To do so, a Petri net model is developed to describe the dynamic behavior of the system by extending the resource-oriented Petri nets such that a schedule can be parameterized with robots' waiting time. Based on this model, conditions for the existence of a one-wafer cyclic schedule with the lower bound of cycle time are presented, and algorithm is developed to find such an optimal schedule. The algorithm requires only simple calculation to set the robots' waiting time and configure the buffer spaces between two individual tools. An example is presented to show the application and power of the proposed method.

Original languageEnglish (US)
Title of host publication2016 13th International Workshop on Discrete Event Systems, WODES 2016
EditorsChristos G. Cassandras, Alessandro Giua, Alessandro Giua, Zhiwu Li
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages349-354
Number of pages6
ISBN (Electronic)9781509041909
DOIs
StatePublished - Jun 22 2016
Event13th International Workshop on Discrete Event Systems, WODES 2016 - Xi'an, China
Duration: May 30 2016Jun 1 2016

Publication series

Name2016 13th International Workshop on Discrete Event Systems, WODES 2016

Other

Other13th International Workshop on Discrete Event Systems, WODES 2016
CountryChina
CityXi'an
Period5/30/166/1/16

All Science Journal Classification (ASJC) codes

  • Computer Networks and Communications
  • Control and Optimization
  • Modeling and Simulation

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