CAD-integrated system for automated multi-photon three-dimensional micro- And nano-fabrication

Ivan B. Divliansky, Gregory Weaver, Michael Petrovich, Toufic Jabbour, Hubert P. Seigneur, Caleb Parnell-Lampen, Amy Thompson, Kevin D. Belfield, Stephen M. Kuebler

Research output: Contribution to journalConference articlepeer-review

4 Scopus citations


Multi-photon three-dimensional micro-/nano-fabrication (3DM) is a powerful technique for creating complex 3D micro-scale structures of the type needed for micro-electromechanical systems (MEMS), micro-optics, and microfluidics. In 3DM high peak-power laser pulses are tightly focused into a medium which undergoes a physical or chemical change following multi-photon excitation at the focal point. Complex structures are generated by serial 3D-patterned exposure within the material volume. To further the application of 3DM to micro-component engineering, we are developing a fully automated and integrated 3DM system capable of creating complex cross-linked polymer structures based on patterns designed in a CAD environment. The system consists of four major components: (1) a femtosecond laser and opto-mechanical system; (2) 3-axis micro-positioner; (3) a computer-controlled fabrication interface; and (4) software for fabrication-path planning. The path-planning software generates a 3DM command sequence based on an object-design input file created using standard commercial CAD software. The 3DM system can be used for start-to-finish design and fabrication of waveguides, 3D photonic crystals, and other complex micro-structures. These results demonstrate a technological path for implementing 3DM as a tool for micro- and nano-optical component manufacture.

Original languageEnglish (US)
Article number29
Pages (from-to)196-203
Number of pages8
JournalProgress in Biomedical Optics and Imaging - Proceedings of SPIE
StatePublished - 2005
Externally publishedYes
EventMicromachining Technology for Micro-Optics and Nano-Optics III - San Jose, CA, United States
Duration: Jan 25 2005Jan 27 2005

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Biomaterials
  • Radiology Nuclear Medicine and imaging


  • Micro-electromechanical systems (MEMS)
  • Micro-fluidics
  • Micro-optical systems
  • Multi-photon three-dimensional microfabrication
  • Photolithography


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