Calculation of emissivity of Si wafers

Bhushan Sopori, Wei Chen, Jamal Madjdpour, N. M. Ravindra

Research output: Contribution to journalArticlepeer-review

34 Scopus citations

Abstract

A computer-software, EMISSIVITY, has been developed to calculate the emissivity (ε) of silicon wafers of any surface morphology, for a given temperature and dopant concentration. The software uses a combination of ray- and wave-optics approaches to include the interference and the polarization effects necessary for multilayer surface coatings and multi-reflections within thin wafers. The refractive index and the absorption coefficient are calculated as a function of temperature and dopant concentration using an empirical model for an indirect bandgap semiconductor. The results of this model are compared with conventional emissivity calculations and experimental data.

Original languageEnglish (US)
Pages (from-to)1385-1389
Number of pages5
JournalJournal of Electronic Materials
Volume28
Issue number12
DOIs
StatePublished - Dec 1999

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Electrical and Electronic Engineering
  • Materials Chemistry

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