Center embossed diaphragm design guidelines and Fabry-Perot diaphragm fiber optic sensor

Yan Sun, Ganhua Feng, George Georgiou, Edip Niver, Karen Noe, Ken Chin

Research output: Contribution to journalArticlepeer-review

12 Scopus citations

Abstract

This research established the design guidelines for center embossed diaphragms for micro-diaphragm fiber type sensors. Following the guidelines, a center embossed diaphragm fiber optic sensor (CE-DFOS) based on Fabry-Perot interference was designed and fabricated with micro-electro-mechanical system (MEMS) technology. The CE-DFOS was experimentally verified to have the designed intrinsic frequency, and demonstrated high sensitivity in parallel testing with a piezoelectric (PZT) sensor.

Original languageEnglish (US)
Pages (from-to)711-716
Number of pages6
JournalMicroelectronics Journal
Volume39
Issue number5
DOIs
StatePublished - May 2008

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering

Keywords

  • Acoustic sensor
  • Center embossed diaphragm
  • Fabry-Perot
  • Fiber optic
  • MEMS

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