Center embossed diaphragm design guidelines and Fabry-Perot diaphragm fiber optic sensor

Yan Sun; Ganhua Feng; George Georgiou; Edip Niver; Karen Noe; Ken Chin

doi:10.1016/j.mejo.2007.12.020

Center embossed diaphragm design guidelines and Fabry-Perot diaphragm fiber optic sensor

Yan Sun, Ganhua Feng, George Georgiou, Edip Niver, Karen Noe, Ken Chin

Research output: Contribution to journal › Article › peer-review

14 Scopus citations

Abstract

This research established the design guidelines for center embossed diaphragms for micro-diaphragm fiber type sensors. Following the guidelines, a center embossed diaphragm fiber optic sensor (CE-DFOS) based on Fabry-Perot interference was designed and fabricated with micro-electro-mechanical system (MEMS) technology. The CE-DFOS was experimentally verified to have the designed intrinsic frequency, and demonstrated high sensitivity in parallel testing with a piezoelectric (PZT) sensor.

Original language	English (US)
Pages (from-to)	711-716
Number of pages	6
Journal	Microelectronics Journal
Volume	39
Issue number	5
DOIs	https://doi.org/10.1016/j.mejo.2007.12.020
State	Published - May 2008

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Atomic and Molecular Physics, and Optics
Condensed Matter Physics
Surfaces, Coatings and Films
Electrical and Electronic Engineering

Keywords

Acoustic sensor
Center embossed diaphragm
Fabry-Perot
Fiber optic
MEMS

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10.1016/j.mejo.2007.12.020

Cite this

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title = "Center embossed diaphragm design guidelines and Fabry-Perot diaphragm fiber optic sensor",

abstract = "This research established the design guidelines for center embossed diaphragms for micro-diaphragm fiber type sensors. Following the guidelines, a center embossed diaphragm fiber optic sensor (CE-DFOS) based on Fabry-Perot interference was designed and fabricated with micro-electro-mechanical system (MEMS) technology. The CE-DFOS was experimentally verified to have the designed intrinsic frequency, and demonstrated high sensitivity in parallel testing with a piezoelectric (PZT) sensor.",

keywords = "Acoustic sensor, Center embossed diaphragm, Fabry-Perot, Fiber optic, MEMS",

author = "Yan Sun and Ganhua Feng and George Georgiou and Edip Niver and Karen Noe and Ken Chin",

note = "Funding Information: The authors acknowledge helpful discussions with Dr. H. Lim, Mr. I. Padron, and Mr. H. Roman, as well as collaborations with Physical Acoustic Corporation. Funding for this research was provided by Public Service of Energy and Gas (PSE&G) and the Foundation of New Jersey Institute of Technology (NJIT).",

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month = may,

doi = "10.1016/j.mejo.2007.12.020",

language = "English (US)",

volume = "39",

pages = "711--716",

journal = "Microelectronics Journal",

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T1 - Center embossed diaphragm design guidelines and Fabry-Perot diaphragm fiber optic sensor

AU - Sun, Yan

AU - Feng, Ganhua

AU - Georgiou, George

AU - Niver, Edip

AU - Noe, Karen

AU - Chin, Ken

N1 - Funding Information: The authors acknowledge helpful discussions with Dr. H. Lim, Mr. I. Padron, and Mr. H. Roman, as well as collaborations with Physical Acoustic Corporation. Funding for this research was provided by Public Service of Energy and Gas (PSE&G) and the Foundation of New Jersey Institute of Technology (NJIT).

PY - 2008/5

Y1 - 2008/5

N2 - This research established the design guidelines for center embossed diaphragms for micro-diaphragm fiber type sensors. Following the guidelines, a center embossed diaphragm fiber optic sensor (CE-DFOS) based on Fabry-Perot interference was designed and fabricated with micro-electro-mechanical system (MEMS) technology. The CE-DFOS was experimentally verified to have the designed intrinsic frequency, and demonstrated high sensitivity in parallel testing with a piezoelectric (PZT) sensor.

AB - This research established the design guidelines for center embossed diaphragms for micro-diaphragm fiber type sensors. Following the guidelines, a center embossed diaphragm fiber optic sensor (CE-DFOS) based on Fabry-Perot interference was designed and fabricated with micro-electro-mechanical system (MEMS) technology. The CE-DFOS was experimentally verified to have the designed intrinsic frequency, and demonstrated high sensitivity in parallel testing with a piezoelectric (PZT) sensor.

KW - Acoustic sensor

KW - Center embossed diaphragm

KW - Fabry-Perot

KW - Fiber optic

KW - MEMS

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JO - Microelectronics Journal

JF - Microelectronics Journal

IS - 5

ER -

Center embossed diaphragm design guidelines and Fabry-Perot diaphragm fiber optic sensor

Abstract

All Science Journal Classification (ASJC) codes

Keywords

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