Close-down process scheduling of wafer residence time-constrained multi-cluster tools

Qinghua Zhu, Mengchu Zhou, Yan Qiao, Naiqi Wu

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Semiconductor manufacturing industry has adopted multi-cluster tools as wafer fabrication equipment that is extraordinarily pricey but highly attractive owing to their higher productivity than single cluster tools can achieve. A challenging issue is how to schedule these tools. It is especially difficult to schedule their frequently occurring close-down processes subject to wafer residency constraints. Such processes appear frequently as caused by wafer lot switches and preventive and emergency maintenances. They are dynamical and non-cyclic. We analyze the synchronization conditions for multiple robots to perform concurrent activities. Upon these conditions, for the situations that an optimal schedule can be found in the steady state, a linear program model is proposed to find a feasible and optimal schedule for close-down processes. An example shows the application and efficiency of our proposed method.

Original languageEnglish (US)
Title of host publicationICRA 2017 - IEEE International Conference on Robotics and Automation
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages543-548
Number of pages6
ISBN (Electronic)9781509046331
DOIs
StatePublished - Jul 21 2017
Event2017 IEEE International Conference on Robotics and Automation, ICRA 2017 - Singapore, Singapore
Duration: May 29 2017Jun 3 2017

Publication series

NameProceedings - IEEE International Conference on Robotics and Automation
ISSN (Print)1050-4729

Other

Other2017 IEEE International Conference on Robotics and Automation, ICRA 2017
CountrySingapore
CitySingapore
Period5/29/176/3/17

All Science Journal Classification (ASJC) codes

  • Software
  • Control and Systems Engineering
  • Artificial Intelligence
  • Electrical and Electronic Engineering

Keywords

  • Cluster tools
  • robotic manufacturing cells
  • semiconductor manufacturing automation

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