Closed-form solution for cycle time of revisiting processes in single-arm cluster tool scheduling with atomic layer deposition

Yuxi Sun, Naiqi Wu, Mengchu Zhou

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations

Abstract

Atomic layer deposition (ALD) is a typical process with wafer revisiting that should be performed by cluster tools. This paper discusses the scheduling problem of single-arm cluster tools for the ALD process. In scheduling such system, the most difficult part is to schedule the revisiting process and obtain its optimal cycle time. This paper studies the revisiting process of ALD with revisiting times k 3, 4, and 5. Analytical expressions are obtained to calculate the cycle time for the k possible schedules with k 3, 4, and 5, respectively, so as to obtain the optimal one. In this way, the scheduling problem of such a revisiting process becomes simple and this is a significant improvement in scheduling cluster tools with wafer revisiting.

Original languageEnglish (US)
Title of host publication2011 International Conference on Networking, Sensing and Control, ICNSC 2011
Pages377-382
Number of pages6
DOIs
StatePublished - Jul 11 2011
Event2011 International Conference on Networking, Sensing and Control, ICNSC 2011 - Delft, Netherlands
Duration: Apr 11 2011Apr 13 2011

Publication series

Name2011 International Conference on Networking, Sensing and Control, ICNSC 2011

Other

Other2011 International Conference on Networking, Sensing and Control, ICNSC 2011
CountryNetherlands
CityDelft
Period4/11/114/13/11

All Science Journal Classification (ASJC) codes

  • Computer Networks and Communications
  • Control and Systems Engineering

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