## Abstract

An important objective of the feedback control for a rapid thermal processing (RTP) system for a semiconductor wafer is to maintain a uniform temperature of the wafer as it follows a given temperature trajectory. In this paper an adaptive control algorithm is developed using a combination of feedback linearization and a new, nonlinear observer for estimating the exogenous disturbance parameters. The dynamic model, exploiting the circular symmetry of the physical configuration, uses coefficients of a Bessel function expansion as the state variables. An interesting separation property of the control algorithm is proved. A simulation study, using process parameters derived from experimental data obtained from an actual RTP system, gives excellent results.

Original language | English (US) |
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Pages (from-to) | 2476-2481 |

Number of pages | 6 |

Journal | Proceedings of the IEEE Conference on Decision and Control |

Volume | 3 |

State | Published - Dec 1 1995 |

Event | Proceedings of the 1995 34th IEEE Conference on Decision and Control. Part 1 (of 4) - New Orleans, LA, USA Duration: Dec 13 1995 → Dec 15 1995 |

## All Science Journal Classification (ASJC) codes

- Control and Systems Engineering
- Modeling and Simulation
- Control and Optimization