Closed-loop adaptive control for rapid thermal processing

Keyphrases

• Closed-loop 100%
• Rapid Thermal Processing 100%
• Adaptive Control 100%
• Processing System 66%
• Simulation Study 33%
• Dynamic Model 33%
• Physical Configuration 33%
• Wafer 33%
• Semiconductor Wafer 33%
• Feedback Linearization 33%
• Feedback Control 33%
• Control Algorithm 33%
• Nonlinear Observer 33%
• Separation Property 33%
• Function Expansion 33%
• Bessel Functions 33%
• Temperature Path 33%
• Uniform Temperature 33%
• Adaptive Control Algorithm 33%
• Exogenous Disturbances 33%
• Disturbance Parameters 33%
• Circular Symmetry 33%

Engineering

• Rapid Thermal Processing 100%
• Closed Loop 100%
• Adaptive Control 100%
• Processing System 66%
• Control Algorithm 66%
• State Variable 33%
• Dynamic Models 33%
• Feedback Control System 33%
• Process Parameter 33%
• Feedback Linearization 33%
• Bessel Function 33%
• Circular Symmetry 33%
• Exogenous Disturbance 33%