Closing-Down Optimization for Single-Arm Cluster Tools Subject to Wafer Residency Time Constraints

Keyphrases

• Closedown 100%
• Cluster Tools 33%
• Customization 16%
• Efficient Process 16%
• Failure Response 16%
• Failure-prone 16%
• Idle State 33%
• Industrial Case Study 16%
• Linear Programming 16%
• Linear Programming Model 16%
• Module Failure 50%
• Process Modules 83%
• Process Optimization 16%
• Residency Time Constraints 100%
• Response Policy 16%
• Robot Tasks 16%
• Scheduling Problem 16%
• Single-armed Cluster Tool 100%
• State Scheduling 16%
• Task Sequencing 16%
• Transient Process 33%
• Wafer 100%
• Wafer Fabrication 16%

Computer Science

• Case Study 33%
• Customisation 33%
• Industrial Case 33%
• Linear Program 33%
• Linear Programming 33%
• Process Optimization 33%
• Programming Model 33%
• Response Policy 33%
• Robotics 33%
• Scheduling Problem 33%
• Time Constraint 100%

Engineering

• Case Study 16%
• Customisation 16%
• down Process 100%
• Failure Response 16%
• Linear Program 16%
• Linear Programming 16%
• Process Optimization 16%
• Programming Model 16%
• Robotics 16%