Cluster-solid interaction experiments

Walter L. Brown, Marek Sosnowski

Research output: Contribution to journalArticlepeer-review

17 Scopus citations

Abstract

Experiments to investigate the interaction of clusters with solids include a number of different types of observations, but with very little systematic study in most of them. In rough order of increasing cluster energy, experiments with non-metallic clusters involve surface cleaning, smoothing of surface topography, sputter erosion, crystallographic damage and impurity doping. The results of these experiments are different than if individual atoms of equivalent velocity had been incident on the solid. Studies of the impingement of metallic clusters on solids have been motivated primarily by interests in the deposition of thin films. The suggested advantages of clusters in this role are only beginning to be established experimentally.

Original languageEnglish (US)
Pages (from-to)305-311
Number of pages7
JournalNuclear Inst. and Methods in Physics Research, B
Volume102
Issue number1-4
DOIs
StatePublished - Aug 1995

All Science Journal Classification (ASJC) codes

  • Nuclear and High Energy Physics
  • Instrumentation

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