CMOS transistor processing compatible with monolithic 3-D integration

B. Rajendran, R. S. Shenoy, D. J. Witte, N. S. Chokshi, R. L. DeLeon, G. S. Tompa, R. F.W. Pease

Research output: Contribution to conferencePaperpeer-review

5 Scopus citations

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Engineering & Materials Science