Colored timed Petri nets for modeling and analysis of cluser tools

Naiqi Wu, Mengchu Zhou

Research output: Contribution to journalArticlepeer-review

63 Scopus citations

Abstract

In this paper, a colored timed resource-oriented Petri net (CTROPN) is developed to model the cluster tools in semiconductor fabrication. It is structurally simple and concise, since each module in a cluster tool corresponds to a unique place in CTROPN. It is also powerful in modeling the qualitative and temporal behavior of the cluster tools with a single-blade or dual-blade robot. The initial transient behavior, steady-state behavior and the final transient behavior can all be investigated through a single model.

Original languageEnglish (US)
Pages (from-to)253-266
Number of pages14
JournalAsian Journal of Control
Volume12
Issue number3
DOIs
StatePublished - May 1 2010

All Science Journal Classification (ASJC) codes

  • Control and Systems Engineering

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