Abstract
In this paper, a colored timed resource-oriented Petri net (CTROPN) is developed to model the cluster tools in semiconductor fabrication. It is structurally simple and concise, since each module in a cluster tool corresponds to a unique place in CTROPN. It is also powerful in modeling the qualitative and temporal behavior of the cluster tools with a single-blade or dual-blade robot. The initial transient behavior, steady-state behavior and the final transient behavior can all be investigated through a single model.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 253-266 |
| Number of pages | 14 |
| Journal | Asian Journal of Control |
| Volume | 12 |
| Issue number | 3 |
| DOIs | |
| State | Published - May 2010 |
All Science Journal Classification (ASJC) codes
- Electrical and Electronic Engineering
- Control and Systems Engineering
- Mathematics (miscellaneous)