Commercialization of SCALPEL masks

R. C. Farrow, A. E. Novembre, M. Peabody, R. Kasica, M. Blakey, J. A. Liddle, K. Werter, R. DeMarco, L. Ocola, L. Rutberg, T. Saunders, J. Unruh, F. Qian, M. Smith

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