Commercialization of SCALPEL masks

R. C. Farrow, A. E. Novembre, M. Peabody, R. Kasica, M. Blakey, J. A. Liddle, K. Werter, R. DeMarco, L. Ocola, L. Rutberg, T. Saunders, J. Unruh, F. Qian, M. Smith

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