Controlled Nucleation of Silicon Nanocrystals on a Periodic Template

Christopher C. Striemer; Rishikesh Krishnan; Philippe M. Fauchet; Leonid Tsybeskov; Qianghua Xie

doi:10.1021/nl015599v

Controlled Nucleation of Silicon Nanocrystals on a Periodic Template

Christopher C. Striemer, Rishikesh Krishnan, Philippe M. Fauchet, Leonid Tsybeskov, Qianghua Xie

Research output: Contribution to journal › Article › peer-review

15 Scopus citations

Abstract

This paper presents a successful unification of standard lithographic approaches (top down), anisotropic etching of atomically smooth surfaces, and controlled crystallization of silicon quantum dots (bottom up) to produce silicon nanoclusters at desired locations. These results, in combination with our previous demonstration of Si nanocrystal uniformity in size, shape, and crystallographic orientation, show strong potential for the application of silicon nanocrystals in electronic devices.

Original language	English (US)
Pages (from-to)	643-646
Number of pages	4
Journal	Nano Letters
Volume	1
Issue number	11
DOIs	https://doi.org/10.1021/nl015599v
State	Published - Nov 2001
Externally published	Yes

All Science Journal Classification (ASJC) codes

Bioengineering
General Chemistry
General Materials Science
Condensed Matter Physics
Mechanical Engineering

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10.1021/nl015599v

Cite this

@article{d3b72bf178ec4a539d77d5e88d7b121c,

title = "Controlled Nucleation of Silicon Nanocrystals on a Periodic Template",

abstract = "This paper presents a successful unification of standard lithographic approaches (top down), anisotropic etching of atomically smooth surfaces, and controlled crystallization of silicon quantum dots (bottom up) to produce silicon nanoclusters at desired locations. These results, in combination with our previous demonstration of Si nanocrystal uniformity in size, shape, and crystallographic orientation, show strong potential for the application of silicon nanocrystals in electronic devices.",

author = "Striemer, {Christopher C.} and Rishikesh Krishnan and Fauchet, {Philippe M.} and Leonid Tsybeskov and Qianghua Xie",

year = "2001",

month = nov,

doi = "10.1021/nl015599v",

language = "English (US)",

volume = "1",

pages = "643--646",

journal = "Nano Letters",

issn = "1530-6984",

publisher = "American Chemical Society",

number = "11",

}

TY - JOUR

T1 - Controlled Nucleation of Silicon Nanocrystals on a Periodic Template

AU - Striemer, Christopher C.

AU - Krishnan, Rishikesh

AU - Fauchet, Philippe M.

AU - Tsybeskov, Leonid

AU - Xie, Qianghua

PY - 2001/11

Y1 - 2001/11

N2 - This paper presents a successful unification of standard lithographic approaches (top down), anisotropic etching of atomically smooth surfaces, and controlled crystallization of silicon quantum dots (bottom up) to produce silicon nanoclusters at desired locations. These results, in combination with our previous demonstration of Si nanocrystal uniformity in size, shape, and crystallographic orientation, show strong potential for the application of silicon nanocrystals in electronic devices.

AB - This paper presents a successful unification of standard lithographic approaches (top down), anisotropic etching of atomically smooth surfaces, and controlled crystallization of silicon quantum dots (bottom up) to produce silicon nanoclusters at desired locations. These results, in combination with our previous demonstration of Si nanocrystal uniformity in size, shape, and crystallographic orientation, show strong potential for the application of silicon nanocrystals in electronic devices.

UR - http://www.scopus.com/inward/record.url?scp=0013273062&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0013273062&partnerID=8YFLogxK

U2 - 10.1021/nl015599v

DO - 10.1021/nl015599v

M3 - Article

AN - SCOPUS:0013273062

SN - 1530-6984

VL - 1

SP - 643

EP - 646

JO - Nano Letters

JF - Nano Letters

IS - 11

ER -

Controlled Nucleation of Silicon Nanocrystals on a Periodic Template

Abstract

All Science Journal Classification (ASJC) codes

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