Cross-sensitivity elimination in a 3-dimensional magnetic sensor

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

In a 3-dimensional integrated magnetic sensor cross-axis sensitivities among the various components of the magnetic field have been a practical design problem. This paper describes the elimination of any cross-sensitivity if a 3-dimensional magnetic sensor is implemented in BiCMOS technology. A device is designed and fabricated by placing a split-collector magnetotransistor and a split-drain MOSFET adjacent to each other to detect the three components of the magnetic field vector.

Original languageEnglish (US)
Title of host publicationESSDERC 1993 - Proceedings of the 23rd European Solid State Device Research Conference
PublisherIEEE Computer Society
Pages775-778
Number of pages4
ISBN (Electronic)2863321358
ISBN (Print)9782863321355
StatePublished - Jan 1 1993
Event23rd European Solid State Device Research Conference, ESSDERC 1993 - Grenoble, France
Duration: Sep 13 1993Sep 16 1993

Other

Other23rd European Solid State Device Research Conference, ESSDERC 1993
CountryFrance
CityGrenoble
Period9/13/939/16/93

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering
  • Safety, Risk, Reliability and Quality

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