Cyclic plasma treatment during ALD Hf1-xZrxO 2 deposition

M. N. Bhuyian, D. Misra, K. Tapily, R. D. Clark, S. Consiglio, C. S. Wajd, G. Nakamur, G. J. Leusink

Research output: Contribution to journalArticlepeer-review

23 Scopus citations

Fingerprint

Dive into the research topics of 'Cyclic plasma treatment during ALD Hf<sub>1-x</sub>Zr<sub>x</sub>O <sub>2</sub> deposition'. Together they form a unique fingerprint.

Engineering & Materials Science

Chemical Compounds