Cyclic plasma treatment during ALD Hf1-xZrxO2 deposition

M. N. Bhuyian, D. Misra, K. Tapily, R. D. Clark, S. Consiglio, C. S. Wajda, G. Nakamura, G. J. Leusink

Research output: Contribution to journal › Conference article › peer-review

2 Scopus citations

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Engineering

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Material Science

Earth and Planetary Sciences