Deadlock avoidance in semiconductor track systems

Naiqi Wu, Meng Chu Zhou

Research output: Contribution to journalConference articlepeer-review

18 Scopus citations


This paper addresses the deadlock avoidance problem in track systems in semiconductor fabrication. Without buffer space in it, the existing deadlock avoidance policies tend to be too conservative. Routing flexibility provides a chance to develop better ones, but makes their computation more complex. This paper models a track system using colored resource-oriented Petri net (CROPN). Based on the model, a sufficient condition for deadlock-free operation and the corresponding control law are presented. This proposed policy is shown computationally efficient. An example is presented to demonstrate its application.

Original languageEnglish (US)
Pages (from-to)193-198
Number of pages6
JournalProceedings - IEEE International Conference on Robotics and Automation
StatePublished - 2002
Externally publishedYes
Event2002 IEEE International Conference on Robotics and Automation - Washington, DC, United States
Duration: May 11 2002May 15 2002

All Science Journal Classification (ASJC) codes

  • Software
  • Control and Systems Engineering
  • Artificial Intelligence
  • Electrical and Electronic Engineering


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