Deadlock modeling and control of semiconductor track systems using resource-oriented Petri nets

N. Wu, M. Zhou

Research output: Contribution to journalArticlepeer-review

42 Scopus citations

Abstract

This paper addresses the deadlock avoidance problem in track systems in semiconductor fabrication. For the system without buffer space in it, the existing deadlock avoidance policies tend to be too conservative. Routing flexibility provides a chance to develop better ones, but makes their computation more complex. This paper models a track system using coloured resource-oriented Petri net (CROPN). Based on the model, a sufficient condition for deadlock-free operation and the corresponding control law are presented. This proposed policy is shown computationally efficient and less conservative than existing methods. An example is presented to demonstrate its application.

Original languageEnglish (US)
Pages (from-to)3439-3456
Number of pages18
JournalInternational Journal of Production Research
Volume45
Issue number15
DOIs
StatePublished - Aug 2007

All Science Journal Classification (ASJC) codes

  • Strategy and Management
  • Management Science and Operations Research
  • Industrial and Manufacturing Engineering

Keywords

  • Control
  • Deadlock avoidance
  • Petri nets
  • System modeling
  • Track systems

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