Defect inspection and linewidth measurement of SCALPEL thin membrane masks using optical transmission

R. C. Farrow, M. I. Blakey, R. Kasica, J. A. Liddle, M. Mkrtchyan, A. Novembre, M. Peabody, T. Saunders, D. Windt, L. S. Zurbrick, J. N. Wiley, C. Aquino, S. L. Hentschel, L. C. Davis, B. Boyer

Research output: Contribution to journal › Conference article › peer-review